Pumps for Semiconductor Cooling
Efficient, compact, and reliable magnetic drive pumps for ultra-low temperature chillers and precision cooling systems.
Techma GPM provides advanced magnetic drive pumps engineered for semiconductor cooling systems operating from -80 °C to +200 °C. Designed for energy efficiency, reliability, and compactness — the ideal choice for next-generation semiconductor equipment.
The Evolution of Cooling in the Semiconductor Industry
The semiconductor market is expanding fast, driven by AI, IoT, automotive electronics, and data centres. These applications demand increasingly precise temperature control and ultra-low temperature cooling. Pumps must deliver high efficiency, compact size, and long-life reliability.
- Growing adoption of ultra-low temperature chillers (-150° C to -50° C)
- Compact, lightweight designs to reduce system footprint
- Energy-efficient motors with optimized hydraulic design
- Environmental focus: reduced carbon footprint and refrigerant impact
Proven Expertise in Semiconductor Cooling
- Reliable performance from – 80 °C to +200 °C
- Custom pump configurations to meet OEM requirements
- In-house motor and pump manufacturing for full quality control
- Long service life for continuous duty cycles
- Compact and lightweight for tight-space installations
Pump Series for Semiconductor Cooling
Techma GPM distributes Sanso magnetic drive pumps designed for semiconductor chillers, sub-zero fluid circulation, and precision thermal control. Below are the product families recommended for this application (4 new product pages will be linked here).
Sanso DC PDH-752
Compact brushless DC magnetic drive pump for semiconductor and laser chiller systems. Delivers quiet, leak-free operation and long service life.
Sanso PDH-1502
High-performance brushless DC magnetic drive pump for industrial chillers and temperature control units. Provides stable flow, high efficiency, and maintenance-free operation.
Sanso DC PDH-2202/3202
High-capacity brushless DC magnetic drive pumps for semiconductor chillers, engineered for low-temperature duty down to ?100 °C with Galden/Fluorinert.
Sanso DC PDH2-3201
Next-generation brushless DC magnetic drive pump for advanced OEM tools. Customizable electronics, materials, and connectors for seamless integration.
Design Concept: Built for the Future
Energy Saving
(for Earth)
High-efficiency hydraulics and motors reduce power consumption across the cooling cycle.
Magnetic drive, sealless construction eliminates leakage points and minimizes maintenance.
Long Life & High Reliability
(for Relief)
Small & Lightweight
(for Space)
Compact layouts enable higher component density in OEM chillers and tools.
FAQ – Semiconductor Cooling
Which pump technology is recommended for sub-zero chillers?
For sub-zero chillers operating down to ?100 °C, brushless DC magnetic drive pumps such as the Sanso PDH and PDH2 series are recommended. Their sealless magnetic design prevents leaks, ensures stable flow, and offers reliable performance with fluids like Galden and Fluorinert.
Can pumps be customized for OEM tools?
Yes, Techma GPM and Sanso provide full OEM customization. Electronics, materials, connectors, and performance curves can be adapted to meet specific integration and thermal control requirements of semiconductor tools
Talk with Our Application Specialists
Techma GPM supports OEMs and integrators with selection, sizing, and integration of magnetic drive pumps for semiconductor cooling.